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Plasma Therm RIE Etching System
Plasma Therm RIE Etching System
Plasma Therm RIE Etching System
Plasma Therm RIE Etching System
Plasma Therm RIE Etching System

Plasma Therm RIE Etching System

$ 50160

Availability: 100 in stock
  • Condition: System complete, refurbished,fully operational and comes with a 90 day warranty. Stock inventory of spare parts available.
  • Country of Manufacture: United States
  • Model: RIE
  • All returns accepted: Returns Accepted
  • Refund will be given as: Money Back
  • Return shipping will be paid by: Buyer
  • Restocking Fee: No
  • Item must be returned within: 14 Days
  • Brand: Plasma Therm
  • Return policy details: The buyer has 14 days to return the item (the buyer pays shipping fees). The item will be refunded.

    Description

    Plasma Therm VLR RIE module, Single wafer manual load system, no Load Lock.  RIE system, Leybold 361C turbo with Leybold  controller, Gate Valve, Advanced Energy RF5S 1000W RF 13.56MHz power supply with match work and tuner. 11" lower platen, 13" shower head. four Mass Flow Controllers (but additional ones can be added for an additional fee)
    Can offer installation & training as well.
    We also maintain a stocked inventory of spare parts for all Plasmatherm systems.
    Service and Support Available.